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Sherif Sedky, PhD

Sherif Sedky is the former associate dean of graduate studies and research at the School of Sciences and Engineering and former director of AUC's Yousef Jameel Science and Technology Research Center.

Sedky was born in Cairo in 1969. He received his Bachelor of Science, with honors, in electronics engineering in 1992 from Cairo University. In 1993, he received a diploma from Cairo University in engineering physics, which is equivalent to a Bachelor of Science, physics major. In 1995, he earned his master's in engineering physics from Cairo University. Then he joined the MEMS group of the Interuniversity Microelectronics Center (IMEC) in Leuven, Belgium, where he received a second master's degree in 1996 and a doctorate in 1998, both from the Katholieke Universiteit Leuven, Belgium. In 1999, he joined the faculty of Cairo University as an assistant professor. In Spring 2002, he was invited as a visiting researcher at the University of California, Berkeley. Afterward, in Fall 2002, he was appointed as assistant professor at The American University in Cairo and was promoted to associate professor in 2004 and professor in 2008. During the summers of 2001, 2003, 2004, 2005, 2006, 2007 and 2008, he was invited as a visiting professor at the Katholieke Universiteit Leuven. More recently, during the summers of 2009, 2010 and 2011, he was invited as a visiting professor at Stanford University.

Sedky is the recipient of the 2007 Excellence in Research and Creative Endeavors Award granted by The American University in Cairo; the prestigious 2002 Egyptian National Award in Advanced Technological Sciences, offered by the Academy of National Research; as well as the graduate studies award from Cairo University in 1996. Sedky's biography is listed in Marquis Who’s Who in the World.

Sedky holds nine patents dealing with the introduction of new techniques for controlling the physical properties of thin films by either alloying different materials together or by localized thermal treatments using short-laser pulses. Sedky has also invented new miniaturized devices that can convert physical phenomena such as infrared radiation, linear acceleration, angular velocity and temperature into electrical signals. In 2003, he established a MEMS fabrication facility at AUC.

Sedky authored and coauthored approximately 90 scientific articles published in highly ranked international journals and conferences. His work has been cited 623 times and his H index is 13. In addition. Sedky is the author of a book titled, Post-processing Techniques for Integrated MEMS, published by Artec House in 2006. This book deals with the different techniques for merging microelectromechanical systems with their driving and control circuits. In addition, Sedky authored a book chapter in the Handbook of Computer Vision and Applications, published by Academic Press in 1999. 

Sedky is a member of the Institute of Electrical and Electronic Engineers and the Materials Research Society. He also served on the scientific committees of several international conferences.

PUBLICATIONS LIST

48 publications of those listed below has been cited 786 times with an H-index 14, and i-10 index 19

1. PATENTS

1. Title: Method of Fabrication of Infra Red Radiation Detectors and more Practically 
    Infrared Sensitive Bolometers
    Authors: P. Fiorini, S. Sedky, M. Caymax and C. Baert
    Pat. No.: EP 086 77 02 March, 3, 2003 (Granted in GB, FR, BE)
    Pat. No.: US Patent #: 6,884,636, April 26, 2005 (Granted)
    Pat. No.  EP 126 30 56 (Pending)
    Pat. No.  JP 04 08 24 1999 (Pending)
    Pat. No. US 0586 1334 (Pending)

2. Title: Method of Fabrication of Infra Red Radiation Detectors and Infrared Detector  
    Device (Cited 68 times)
    Authors: P. Fiorini, S. Sedky, M. Caymax and C. Baert
    Pat. No.: US Patent #: 6,274, 462, August 14, 2001

3. Title: Method of controlling stress in polycrystalline SiGe layer deposited on a substrate.
    Authors: P. Fiorini, S. Sedky, M. Caymax and C. Baert
    Pat. No.: EP 1263056, December 4, 2002

4. Title: Method for depositing polycrystalline SiGe suitable for micromachining
    Authors: Sherif Sedky, Ann Witvrouw, Kris Baert, Matty Caymax, and Cristina Rusu
    Pat. No.: EP 1269 526 B1, August 19, 2009   (Granted)
    Pat. No. US 7176111B2, February 13, 2007 (Granted)

5. Title: Method of manufacturing a thermoelectric generator and thermoelectric generator  
    this obtained.
    Inventors: Vladimir Leonov, Paolo Fiorini, Sherif Sedky, Chris Van Hoof and Kris Baert.
    Pat. No.: European Patent # EP 16 12 870 A1, January 4, 2006

6. Title: Method for forming silicon-germanium layers at low temperatures, layers formed 
    therewith and structures comprising such layers
    Inventors: Sherif Sedky and Ann Witvrouw
    Pat. No. European Patent # EP 1 801 067 A2, June 27, 2007

7. Title: Manufacture of silicon germanium layer for semiconductor device, involves 
    depositing single silicon germanium layer having preset average stress and strain 
    gradient, and annealing predetermined portion of silicon germanium layer
    Inventors: Sherif Sedky and Ann Witvrouw
    Pat. No. US2010032812-A1 Published February 11, 2010

8. Title: Novel MEMS Dipole/Monopole Antenna for Wireless Systems operating at 77 GHz
    Inventors: Ezzeldin Soliman, Sherif Sedky and Mai sallam
    Pat. No. US patent application # 6 1/287,876 December 16, 2009
 
9. Title: MEMS Mass Spring Suspension System Using Out-of-Plane Suspension
    Inventors: Ahmed A. Aziz, Abdel Hameed Sharaf, Mohamed Serry and Sherif Sedky
    Application No. US2011030472-A1, Published 10 February 2011

10. Title: Method for Manufacturing a Micromachined Device and the Micromachined  
      Device  Made Thereof
      Inventors: Joumana El Refai, Ahmed A. Aziz, Ann Witvrouw and Sherif Sedky
      Application No. US Patent Publication #:  US 2011/0180886 A1, July 28, 2011
      European Patent Publication #: EP 2347993 A2


11. Title: Silicon Germanium mask for deep Silicon Etching
      Inventors: Mohamed Serry, Mohamed Refaat and Sherif Sedky
      Application No. U.S. Provisional Application No. 61/448,022; March 1, 2011

2. BOOKS

Title: Post-Processing Techniques for Integrated MEMS
Author: Sherif Sedky
Publisher:
 Artech House Inc, of Norwood, MA, USA, November 2005.
ISBN: 1580539017 (Cited 8 times)

3. BOOK CHAPTERS

Title: Poly SiGe bolometers
Authors: S. Sedky and P. Fiorini
Book: Handbook of Computer Vision Application, Edited by Bernd Jähne, Horst Hauecker and Peter Geiler, Academic Press Feb. (1999), Vol. 1, Ch 10, p. 274-308.

4. CONTRIBUTIONS TO INTERNATIONAL JOURNALS

1. A. M. Elshurafa, K. Khirallah, H. H. Tawfik, A. Emira, A. K. Abdel Aziz and S. M. Sedky, “Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators” Journal of Microelectromechanical Systems (JMEMS) 20 (4), pp. 943-958, August 2011. Impact Factor: 2.157

2. A Sharaf, S. Sedky, M. Serry, A. Elshurafa, M. Ashour, and S. Habib, “A Fully Symmetric and Completely Decoupled MEMS-SOI Gyroscope,” Sensors and Transducers Journal, Vol. 11, Special Issue, April 2011, pp. 10-22.

3. E. A. Soliman, S. Sedky, M. O. Sallam, O. El Katteb, A. K. S. Abdel Aziz, and M. Refaat, (2010) “Novel MEMS dipole/monopole antenna for wireless systems operating at 77 GHz,” Progress in Electromagnetics Research Symposium Online-PIERS, vol. 6, No. 6, June 2010, pp. 547-550. Impact Factor: 3.32.

4. Ahmed Abdel Aziz, Mohannad Elsayed, Hassan Abu Bakr, Joumana El-Rifai, Tom Van der Donck, Jean-Pierre Celis, Vladimir Leonov, Paolo Fiorini and Sherif Sedky, “Pulsed Laser Deposition of Bismuth telluride thin films for MEMS thermoelectric Energy Harvesters”, Journal of Electronic Materials, Volume 39, Issue 9 (2010), Page 1920. Impact Factor: 1.39

5. Ahmed Ibrahim, Hanadi Salem, and Sherif Sedky, “Excimer laser Surface Treatment of Plasma Sprayed Al2O3+13wt.% TiO2 Coatings”, Journal of Surface and Coatings Technology, Vol. 203, August 2009, pp. 3579-3589. Impact Factor: 2.135

6. Koen De Munck, Jan Bogaerts, Deniz S. Tezcan, Piet De Moor, Sherif Sedky and Chris Van Hoof, “Backside thinned CMOS imagers with high broadband quantum efficiency realized using a new integration process”, Electronics Letters, vol. 44, n 1, 2008, p 50-52. Times Cited: 1. Impact Factor: 1.001

7. Sherif Sedky, “SiGe: An Attractive Material for Post-CMOS Processing of MEMS”, Microelectronic Engineering, Vol. 84, pp. 2491-2500, November, 2007. Times Cited: 4. Impact Factor: 1.569

8. Sherif Sedky, Ahmed Bayoumy, Ahmed Alaa, Ahmed Nagy, and Ann Witvrouw, “Optimal Conditions for Micromachining Si1-xGex at 210°C”, Journal of Microelectromechanical Systems, Vol. 16, No. 3, June 2007, pp. 581-588. Times Cited: 5. Impact Factor: 2.157

9. Sherif Sedky, Maria Gromova, Tom Van der Donck, Jean-Pierre Celis and Ann Witvrouw, “Characterization of KrF Excimer Laser Annealed PECVD SixGe1-x for MEMS Post-Processing”, Sensors and Actuators A: Physical, Vol. 127, No. 2, pp. 316-323, March 2006. Times Cited: 8. Impact Factor: 1.933

10. Sherif Sedky, Jeremy Schroeder, Timothy Sands, and Tsu-Jae King and Roger T. Howe, “Effect of Excimer Laser Annealing on the Structural Properties of Silicon Germanium deposited at 400°C”, Journal of Materials Research, 19 (12), pp. 3503-3511, December 2004. Times Cited: 5. Impact Factor: 1.395

11. S. Sedky, R. T. Howe and T. J. King, “Pulsed Laser Annealing, a Low Thermal Budget Technique for Eliminating Stress Gradient in Poly-SiGe MEMS Structures”, Journal of MicroElectroMechanical Systems, 13 (4), pp. 669-675, August, 2004. Time cited: 16. Impact Factor: 2.157

12.  C. Rusu, S. Sedky, B. Parmentier, A. Verbist, O. Richard, B. Brijs, L. Geenen, A. Witvrouw, “New Low-Stress PECVD Poly-SiGe Layers For MEMS”, Journal of MicroElectroMechanical Systems (JMEMS), 12 (6), pp. 816-825, December, 2003. Times Cited: 20. Impact Factor: 2.157

13.  Sherif Sedky, Ann Witvrouw, Matty Caymax, Annelies Saerens and Paul Van Houtte, “Characterization of RPCVD Polycrystalline Silicon Germanium Deposited at Temperatures £ 550°C”, Journal of Materials Research, Vol. 17 (7), pp. 1580-1586, July, 2002. Times Cited: 4. Impact Factor: 1.395

14.  Sherif Sedky, Ann Witvrouw and Kris Baert, “Poly SiGe, a Promising Material for MEMS Monolithic Integration with the Driving Electronics”, Sensors and Actuators A, Physical, 97-98C pp. 503-511, April, 2002 . Times Cited: 24. Impact Factor: 1.933

15.  Sherif Sedky, Ann Witvrouw, Annelies Saerens, Paul Van Houtte, Jef Poortmans and Kris Baert, “Effect of In-Situ Boron Doping on Properties of Silicon Germanium Films Deposited by CVD at 400°C”, Journal of Materials Research, 16 (9), p. 2607-12, September, 2001 . Times Cited: 17. Impact Factor: 1.395

16.  Sherif Sedky, Ann Witvrouw, Hugo Bender and Kris Baert, “Experimental Determination of the Maximum Post Processing Temperature of MEMS on Top of Standard CMOS Wafers”, IEEE transactions on Electron Devices, Vol. 48 (2), p. 377-385, February, 2001. Times Cited: 37. Impact Factor: 2.255

17.  A. Witvrouw, F. Van Steenkiste, D. Maes, L. Haspeslagh, P. Van Gerwen, P. De Moor, S. Sedky, C. Van Hoof, A. C. de Vries, A. Verbist, A. De Caussemaeker, B. Parmentier and K. Baert, “Why CMOS-Integrated Transducers? A Review”, Microsystem Technologies, Vol. 6 (5), p 192-199, August 2000. Times Cited: 18.

18.  S. Sedky, P. Fiorini, K. Baert, L. Hermans and R. Mertens, “Characterization and Optimization of Infra Red Poly SiGe Bolometers”, IEEE transactions on Electron Devices, 46(4), 675-682, April 1999. Times Cited: 101. Impact Factor: 2.255

19.  S. Sedky, P. Fiorini, M. Caymax, C. Baert, L. Hermans and R. Mertens, “Characterization of Bolometers Based on Polycrystalline Silicon Germanium Alloys”, IEEE Electron Device Letters, 19(10), 376-379, October 1998. Times Cited: 22. Impact Factor: 2.714

20.  S. Sedky, P. Fiorini, M. Caymax, S. Loreti, K. Baert, L. Hermans and R. Mertens, “Structural And Mechanical Properties of Polycrystalline Silicon Germanium for Micromachining Applications”, Journal of Microelectromechanical Systems 7(4), 365-372, December 1998. Times Cited: 31. Impact Factor: 2.157

21.  S. Sedky, P. Fiorini, M. Caymax, A. Verbist and C. Baert, “IR Bolometers Made of Polycrystalline Silicon Germanium”, Sensors and Actuators A, 66 (1-3), 193-199, April 1998. Times Cited: 65. Impact Factor: 1.933

22.  Amr M. Shaarawi, Sherif M. Sedky, Fawzia M. Taiel, Richard W. Ziolkowski and Ioannis M. Besieris, “Spectral Analysis of Time-limited Gaussian Wave Fields”, Journal of the Optical Society of America A-Optics, Image Science and Vision, Vol. 13, pp. 1827-1836, September 1996. Times Cited: 8. Impact Factor: 1.933

23.  Sherif M. Sedky, Amr M. Shaarawi, Ioannis M. Besieris and Fawzia M. M. Taiel, “Diffraction Length of Localized Waves Generated by Dynamic Apertures”, Journal of the Optical Society of America A-Optics, Image Science and Vision, Vol. 13, pp. 1719-1727, August 1996. Times Cited: 10. Impact Factor: 1.933

24.  Amr M. Shaarawi, Sherif M. Sedky, Richard W. Ziolkowski and Fawzia M. M. Taiel, “Effect of the Switching Pattern of the Illumination of Dynamic Apertures on the Ranges of the Generated Localized Waves”, Journal of the Optical Society of America A, Vol. 13, pp. 1712-1718, August 1996. Times Cited: 8. Impact Factor: 1.933

25.  Amr M. Shaarawi, Sherif M. Sedky, Richard W. Ziolkowski and Ioannis M. Besieris, “The Spatial Distribution of the Illumination of Dynamic Apertures and its Effect on the Decay Rate of the Radiated Localized Pulses”, Journal of Physics A: Mathematical and Theoretical, Vol. 29, pp. 5157-5179, August 1996. Times Cited: 9. Impact Factor: 1.641

26.  Amr M. Shaarawi, Ioannis M. Besieris, Richard W. Ziolkowski and Sherif M. Sedky, “Generation of Approximate Focus Wave Mode Pulses from Wide-Band Dynamic Gaussian Apertures”, Journal of the Optical Society of America A-Optics, Image Science and Vision, Vol. 12, pp. 1954-1964, September 1995. Times Cited: 34. Impact Factor: 1.933

 27. Amr M. Shaarawi, Sherif M. Sedky, Richard W. Ziolkowski and Ioannis M. Besieris, “The Spatial Distribution of the Illumination of Dynamic Apertures and its Effect on the Decay Rate of the Radiated Localized Pulses”, Journal of Physics A: Mathematical and Theoretical, Vol. 29, pp. 5157-5179, August 1996. Times Cited: 9. Impact Factor: 1.641

28. Amr M. Shaarawi, Ioannis M. Besieris, Richard W. Ziolkowski and Sherif M. Sedky, “Generation of Approximate Focus Wave Mode Pulses from Wide-Band Dynamic Gaussian Apertures”, Journal of the Optical Society of America A-Optics, Image Science and Vision, Vol. 12, pp. 19541964, September 1995. Times Cited: 34. Impact Factor: 1.933

 5. INTERNATIONAL CONFERENCES 

1. M. Serry, M. Ibrahim and S. Sedky, “Silicon Germanium as a Novel Mask for Silicon Deep Reactive Ion Etching”, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France (accepted).

2. M. O. Sallam, E. A. Soliman, and S. Sedky, “Reconfigurable MEMS Antenna with Polarization Diversity for mm-Wave Applications” European Conference on Antennas and Propagation (EuCAP), Prague, Czech Republic, March 2012 (submitted).

3. H. F. Abutarboush, H. H. Tawfik, E. A. Soliman, M. O. Sallam, A. Shamim, and S. Sedky, “Effects of Wafer-Level Packaging on mm-Wave Antennas” Loughborough Antennas & Propagation Conference, UK, Nov. 2011 (accepted).

4. E. A. Soliman, M. O. Sallam, S. Hassan, and S. Sedky, “Dual-Band 60/77 GHz MEMS Antenna on High-Resistivity Silicon,” 41st European Microwave Conference (EuMC), Manchester, United Kingdom, Sept. 2011.

5. M. O. Sallam, E. A. Soliman, S. Hassan, O. El Katteb, and S. Sedky, “77 GHz MEMS Antennas on High-Resistivity Silicon for Linear and Circular Polarization,” IEEE AP-S International Symposium (APS/URSI), Spokane, Washington, USA, July 2011.

6. Mai Sallam, Ezzeldin Soliman, Shimaa Hassan, Ola El Katteb, Sherif Sedky, “77 GHz MEMS Antennas on High-Resistivity Silicon for Linear and Circular Polarization”, 2011 IEEE AP-S International Symposium on Antennas and Propagation and 2011 USNC/URSI National Radio Science Meeting in Spokane, Washington, USA, July 3-8, 2011.

7. J. El-Rifai, S. Sedky,R. Van Hoof, S. Severi, D. Lin, R. Puers, C. Van Hoof and A. Witvrouw, “Laser Annealed SiGe Devices for MEMS Applications at Temperatures Below 250°C”, Transducers 2011, Beijing, China, June 5-9, 2011, pp. 1336-1339.

8. M. O. Sallam, E. A. Soliman, and S. Sedky, “Novel linearly and circularly polarized 60 GHz MEMS antennas on low- and high-resistivity silicon,” 2011 5th European Conference on Antennas and Propagation (EuCAP), pp 1194-8 April 2011, Rome, Italy.

9. Sherif Sedky, Hani Tawfik, Ahmed Abdel Aziz, J. Provine, and Roger T. Howe, “Low Thermal-Budget Silicon Sealed-Cavity Microencapsulation Process”, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, January 23 – 27, 2011, pp. 276-279.

10.  Joumana El-Rifai, Ann Witvrouw, Ahmed Abdel Aziz, Robert Puers, Chris Van Hoof and Sherif Sedky, "Contact Resistivity of Laser Annealed SiGe for MEMS Structural Layers Deposited at 210⁰C”, Materials Research Society Symposium Proceedings Vol. 1299, 2011 pp. 73-78. 

11.  M. Abdelghany, K. Khairallah, M. Elsayed, A. Emira and S. Sedky, “A Universal Gyroscope Driving Circuit with 70dB Amplitude Control Range”, 2010 53rd IEEE International Midwest Symposium on Circuits and Systems (MWSCAS), August 2010, Pages: 252-5

12.  E. A. Soliman, S. Hassan, O. El Katteb, M. Serry and S. Sedky, “77-GHz MEMS brick-wall antenna fed by coupled microstrip lines" ,2010 IEEE International Symposium Antennas and Propagation and CNC-USNC/URSI Radio Science Meeting, 11-17 July 2010, Toronto, ON, Canada.

13.  A. Shamim, K. Salama, E. Soliman, and S. Sedky, “On-chip antenna: Practical design and characterization considerations”, 2010 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference (AMEREM/ANTEM 2010).

14.  Mohannad Elsayed, Ahmed Emira, Sherif Sedky and S. E. D. Habib, “A Single-Ended CMOS Sensing Circuit for MEMS Gyroscope with Noise Cancellation”, 2010 8th IEEE International NEWCAS Conference (NEWCAS 2010) pp. 385-8 Montreal, QC, Canada, June 2010.

15.  A. Sharaf, S. Sedky, M. Serry, A. Shurafa, M. Ashour and S. Habib “A Fully Symetric and Completely Decoupled MEMS SOI Gyroscope”, MicroTech Conference & Expo 2010, Anaheim, California, USA, June 21-25, 2010.

16.  E. A. Soliman*, S. Hassan, O. El Katteb, M. O. Sallam, M. Serry, and S. Sedky "77-GHz MEMS Brick-Wall Antenna Fed by Coupled Microstrip Lines”, The 2010 IEEE AP-S International Symposium on Antennas and Propagation and 2010 USNC/CNC/URSI Meeting in Toronto, ON, Canada, on July 11-17, 2010.

17.  A. Shamim, K. Salama, E. Soliman and S. Sedky, “On-chip Antenna: Design and Characterization Considerations”, 14th International Symposium on Antennas and Electromagnetics and The American Electromagnetics Conference July 5–9, 2010 Ottawa, ON, CANADA

18.  E. A. Soliman, S. Sedky, M. O. Sallam, O. El Katteb, A. K. S. Abdel Aziz, and M. Refaat, (2010), “Novel MEMS dipole/monopole antenna for wireless systems operating at 77 GHz,” Progress in Electromagnetics Research Symposium, Cambridge, USA, July 2010, pp. 765-768.

19.  M. Serry, E. Abdel Rahman and S. Sedky, “MEMS Environmentally-Friendly Power Generation Based On Thermoacoustic Heat Engine,” 2009 Mid-Atlantic MEMS Alliance Symposium, Georgetown University, Washington D.C., USA, November 30, 2009. (abstract)

20.  M. Serry, E. Abdel Rahman and S. Sedky, “A Novel MEMS Based Thermoacoustic Heat Engine For Micro-Power Generation,” MicroTech Conference & Expo 2010, Anaheim, California, USA, June 21-25, 2010

21.  Joumana El-Rifai, Ann Witvrouw, Ahmed Abdel Aziz, Robert Puers, Chris Van Hoof and Sherif Sedky, “Selective Laser Annealing for Improved SiGe MEMS Structural Layers at 210˚C”, 23rd IEEE International Conference on Micro Electro Mechanical Systems – MEMS 2010, January 24-28, 2010, pp. 324-7.

22.  M. Serry, A. Abdel Aziz, E. Abdel Rahman and S. Sedky, “A New Approach for MEMS Power Generation Based on Thermoacoustic Heat Engine,” The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009), Silver Spring, Maryland, USA, December 1-4, 2009

23.  Joumana El-Rifai, Ann Witvrouw, Ahmed Abdel Aziz, Bob Puers, Chris Van Hoof and Sherif Sedky, "Harsh laser annealing techniques for improved crystallization of a-Si(Ge) layers deposited at 210C" SAFE Proc., pp. 63-66, November 2009.

24.  Ahmed Abdel Aziz, Abdel-Hameed Sharaf and Sherif Sedky, “Novel Architecture for Inertial Grade SOI MEMS Inertial Sensors”, 2009 IEEE International SOI Conference, 5-8 October 2009, Foster City, CA, USA.

25.  Ahmed Abdel Aziz, Mohannad Elsayed,Hassan Abu Bakr, Joumana El-Rifai, Tom Van der Donck, Jean-Pierre Celis, Vladimir Leonov, Paolo Fiorini and Sherif Sedky, “Pulsed Laser Deposition of Bismuth telluride thin films for MEMS thermoelectric Energy Harvesters” 28th International Conference on Thermoelectrics (ICT) and 7th European Conference on Thermoelectrics (ECT), Freiburg, Germany, July 26-30, 2009.

26.  Sherif Sedky, Ahmed Kamal, Hasan Bakr, Rami Ghannam,  Vladimir Leonov and Paolo Fiorini, “Bi2Te3 as an Active Material for MEMS Based Devices Fabricated at Room Temperature”, 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009, 21-25 June 2009, Denver, CO, USA pp. 1035-1038.

27.  J. El-Rifai, S. Sedky, R. Wasfi, C. Van Hoof, A. Witvrouw, “Laser-induced Crystallization of SiGe MEMS Structural Layers Deposited at Temperatures Below 250oC”, Materials Research Society Symposium Proceedings Vol. 1153, pp. 391-396, 2009.

28.  Ahmed Kamal, Hassan Abu Bakr, Ziyang Wang, H. El Samman, Paolo Fiorini, and Sherif Sedky, “Characterization of (Bi0.25sb0.75)2te3 Deposited by Pulsed Laser Deposition”, 2nd International Conference on Multifunctional Nanocomposites & Nanomaterials, pp. 33-38, Janury 11-13, 2008.

29.  Abdelhameed Sharaf, Sherif Sedky, Mahmoud A. Ashour, Serag E.-D. Habib, “MEMS-Based Gyroscope: Design, Analysis and Simulation”, 2nd International Conference on Multifunctional Nanocomposites & Nanomaterials, pp. 27-31, Janury 11-13, 2008.

30.  Medhat Haroun, and Sherif Sedky, “Application of Nanotechnology in Construction Engineering”, The sixth International Conference of Construction Engineering, Alexandria, April 15-18, 2007.

31.  Koen De Munk, Deniz Tezcan, Tom Borgers, Wouter Ruythooren, Piet De Moor, Sherif Sedky, Cinzia Toccafondi, Jan Bogaerts, and Chris Van Hoof, “High performance hybrid and monolithic backside thinned CMOS imagers realized using integrated process”, International Electronics Device Meeting (IEDM), pp. 1-4, December 2006. Times cited: 8.

32.  Abdel Hamid Sharaf, Sherif Sedky, and Serag E. D. Habib, “Complete analysis of a novel fully symmetric decoupled micromachined gyroscope”, The 2006 International Conference on MEMS, Nano and smart systems, pp. 35-40, December 2006. Times Cited: 1.

33.  Abdelhameed Sharaf, Sherif Sedky, and Serag E.-D Habib, “Design and Simulation of a New Decoupled Micromachined Gyroscope”, Journal of Physics: Conference Series 34 (2006) pp. 464-469. Times Cited: 2.

34.  Sherif Sedky, Ibrahim El Deftar, and Omar Mortagy, “Pulsed Laser Deposition of Boron Doped Si70Ge30”, Materials Research Society Meeting, Spring 2006, Vol. 901, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006, 2007, p 273-278.

35.  Sherif Sedky, Omar Mortagy and Ann Witvrouw, “Low Thermal Budget Techniques for controling stress in Si1-xGex Deposited at 210°C”, Materials Research Society symposium proceedings, Vol. 901, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006, 2007, p 565-570

36.  V. Leonov, P. Fiorini, S. Sedky, T. Torfs and C. Van Hoof, “Thermoelectric MEMS Generators as a Power Supply for a Body Area Network”, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, COEX, Seoul, Korea, June 5-9, 2005, pp. 291-294. Times Cited: 50.

37.  Sherif Sedky and Ann Witvrouw, “Micromachining of Pulses Laser Annealed PECVD SixGe1-x Deposited at Temperatures  370°C”, The 18th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami, Florida, USA, pp. 487-490.  Times Cited: 3.

38.  Sherif Sedky, Kris Baert, Chris Van Hoof, Yi Wang, Omer Van Der Biest and Ann Witvrouw, “Metal induced crystallization of SiGe at 370°C for monolithically integrated MEMS applications”, Material Research Society symposium proceedings, Spring 2004, Vol. 808, Amorphous and Nanocrystalline Silicon Science and Technology - 2004, 2004, pp. 333-338.  

39.  Ann Witvrouw, Maria Gromova, Anshu Mehta, Sherif Sedky, Piet De Moor, Paolo Fiorini, Kris Baert, Chris van Hoof, “Poly SiGe, a superb material for MEMS”, Material Research Society symposium proceedings, Volume 782, 2003, pp. 25-36. Times Cited: 17.

40.  Tsu-Jae King, Roger T. Howe, Sherif Sedky, Gang Liu, Blake C. -Y. Lin and Matthew Wasilik, Christoph Duenn, “Recent Progress in Modularly Integrated MEMS Technologies”, International Electronics Device Meeting (IEDM), December 2002. pp. 199-202. Times Cited: 22.

41.  Sherif Sedky, Jeremy Schroeder, Timothy Sands, Roger Howe and  Tsu-Jae King, “Pulsed Laser Annealing of Silicon-Germanium Films”, Material Research Society symposium proceedings vol. 741, pp. 61-66 Fall 2002. Times Cited: 5.

42.  Sherif Sedky, “Electrical Properties and Noise of Poly SiGe Deposited at Temperatures Compatible With MEMS Integration on Top of Standard CMOS”, Material Research Society symposium proceedings vol. 729, p. 83-88, Spring 2002. Times Cited: 1.

43.  Sherif Sedky, Paolo Fiorini, Ann Witvrouw and Kris Baert, “Sputtered Tantalum as a Structural Material for Surface Micromachined RF Switches”, Material Research Society symposium proceedings vol. 729, p. 89-94, Spring 2002. Times Cited: 1.

44.  C. Rusu, G. Klaasse, S. Sedky, H. Esch, B. Parmentier, A. Verbist, A.
Witvrouw and K. Baert, “Planarization of deep trenches”, Proceedings of SPIE Micromachining and Microfabrication Process technology VII, pp. 49-57, 22-24 Oct. 2001, San Fransisco, CA, USA. Times Cited: 2.

45.  Sherif Sedky, Ann Witvrouw and Kris Baert, “Polycrystalline Silicon Germanium, a Promising Material for MEMS Post-Processing on Top of Standard CMOS Wafers”, The 11th International conference on solid state sensors and actuators, June 11-14, 2001, Germany, p. 988. Times Cited: 2.

46.  Peit De Moor, Joachim John, Sherif Sedky and Chris Van Hoof, “Linear Arrays of Fast Uncooled Poly SiGe Microbolometers for IR Detection”, Proceedings of SPIE Vol 4028: "Infrared Detectors and Focal Plane Arrays VI" p.27-34. Times Cited: 6.

47.  Sherif Sedky, Ann Witvrouw, Matty Caymax, Annelies Saerens and Paul Van Houtte, “Effect of Deposition Conditions on the Structural and Mechanical Properties of Poly SiGe”, Material Research Society symposium proceedings vol. 609 A851-856, Spring 2000. Times Cited: 5

48.  Sherif Sedky, Paolo Fiorini, Stefano Loreti, Matty Caymax, Kris Baert and Chris Van Hoof, “Analysis of the Structural Properties of Poly Silicon Germanium Films”, The Eleventh international conference on microelectronics, November 22-25 1999, Kuwait, pp. 67-70.

49.  Piet De Moor, Sherif Sedky, Deniz Sabuncuoglu and Chris Van Hoof, “Linear Arrays of Uncooled Poly SiGe Microbolometers for IR Detection”, Micromachined devices and components V, Proceeding of SPIE vol. 3876, September 20-21, 1999, Santa Clara, pp. 256-259. Times Cited: 4.

50.  Piet De Moor, Sherif Sedky, Deniz Sabuncuoglu and Chris Van Hoof, “Uncooled IR Bolometers Using Surface Micromachined Poly SiGe.”, 2nd International conference on Integrated Micro/Nanotechnology for Space Applications - MNT April 11-15, Pasadena (CA), pp. 43-46 1999.

51.  Sherif Sedky, Paolo Fiorini, Piet De Moor, Kris Baert and Chris Vanhoof, “Polycrystalline Silicon Germanium as a Structural Material for Surface Micromachining”, The 10th International conference on solid state sensors and actuators, pp. 492-495, June 7-10, 1999, Japan.

52.  F. Van Steenkiste, D. Maes, L. Haspeslagh, S. Sedky, P. Van Gerwen, S. Vandergroen and K. Baert, “CMOS-Based Transducers”, Microsystem technologies, 6th international conference on Micro Electro, Opto, Mechanical Systems and Components, pp. 367-372, December 1-3, 1998, Germany. Times Cited: 2.

53.  S. Sedky, P. Fiorini, M. Caymax, and C. Baert, “Poly Silicon Germanium Alloys, a Suitable Material for Surface Micromachined Devices”, Microsystem technologies, 6th international conference on Micro Electro, Opto, Mechanical Systems and Components, December 1-3, 1998, Germany, pp. 709-711.

54.  F. Van Steenkiste, D. Maes, L. Haspeslagh, S. Sedky, P. Van Gerwen, S. Vandergroen and K. Baert, “CMOS-Based Sensors and Actuators”, 1998, 11th annual IEEE international ASIC conference, September 1998, pp. 393-397.

55.  S. Sedky, P. Fiorini, M. Caymax, A. Verbist, C. Baert and L. Hermans, “IR Bolometers Made of Polycrystalline Silicon Germanium Alloys”, 2nd Round Table on Micro/Nano Technologies for Space, ESA, (1997), The Netherlands, pp. 179-186.

56.  P. Fiorini, S. Sedky, M. Caymax and K. Baert, “Preparation and Residual Stress Characterization of Poly-Silicon Germanium Films Prepared by Atmospheric Pressure Chemical Vapor Deposition”, Proceedings of Material Research Society Symposium 474, (1997), USA, pp. 227-231. Times Cited: 2.

57.  S. Sedky, P. Fiorini, M. Caymax, A. Verbist and C. Baert, “Thermally Insulated Structures for IR Bolometers, Made of Polycrystalline Silicon Germanium Alloys”, 1997 International conference on solid state sensors and actuators. Digest of technical papers. IEEE, New York, 1525, pp. 237-240, 1997. Times Cited: 8.

58.  Piet De Moor, Sherif Sedky, D. Sabuncuoglu and C. Van Hoof, “Uncooled IR Bolometers Using Surface Micromachined Poly SiGe”, Mid-Infrared Optoelectronics Material and Devices (MIDMD III), Acken, September 5-7, 1999 (Abstract).

59.  P. De Moor, S. Sedky, D. Sabuncuoglu and C. Van Hoof, “Uncooled IR Bolometers Using Surface Micromachined Poly SiGe”, Presented at the 29th-IR Kolloquium in Freiburg, Germany, April 27-28 1999 (Oral presentation).

60.  Sherif M. Sedky, Amr M. Shaarawi, Fawzia M. M. Taiel, and Ioannis M. Besieris, “On the Diffraction Length of Localized Waves generated by Dynamic Apertures”, Presented at the International IEEE/APS Symposium and National Radio Science Meeting, Baltimore, Maryland, July 1996. URSI Digest (Abstract).

61.  Amr M. Shaarawi, Sherif M. Sedky and Richard W. Ziolkowski, “The Switching Pattern of the Illumination of Dynamic Apertures and Its Effect on the Ranges of the Generated Localized Waves”, Presented at the Progress in Electromagnetics Research Symposium (PIERS), Seattle, Washington, July 1995. PIERS Proceedings p. 309 (Abstract).